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FJ-620/FJ-500F Molecular Pump Unit
FJ-620/FJ-500F series combined molecular pump unit is a clean and ultra-high vacuum acquisition equipment
with various F160/620 series combined molecular pumps or FF-160/500F combined molecular pumps, fore-pump,
cutoff vent valve, backing line, water shutoff protector, molecular pump power pack, control power pack etc.
assembled on the stand. It provides convenient installation, simple operation, easy connection, reliable performance,
and is widely used in surface analysis, accelerator technique, semi-conductive devices, plasma technique,
manufacturing of electro-vacuum elements and vacuum technique etc.
Techncial Parameters:
| Type |
FJ-620 |
FJ-620T
|
FJ-620N |
| Pumping Speed (50Hz) |
DN160LF |
DN160CF |
DN160LF |
DN160CF |
DN160LF |
DN160CF |
| Pumping rate L/S (for air) |
600 |
600 |
600 |
| Compression Ratio |
N2 |
109 |
109 |
109 |
| H2 |
6¡Á103 |
6¡Á103 |
6¡Á103 |
| Ultimate Pressure (Pa) |
6¡Á10-6 |
6¡Á10-7 |
6¡Á10-6 |
6¡Á10-7 |
6¡Á10-6 |
6¡Á10-7 |
| Input Voltage/Frequency (V/Hz) |
380¡À20/50¡À1 |
| Cooling Water Pressure (kg/cm-2) |
0.5¡«1 |
| Fore Pump Type |
RVP-6 |
| Ambient Temperature |
4¡«40 °C |
| Type |
FJ-620C |
FJ-500F |
| Pumping Speed (50Hz) |
DN160LF |
DN160CF |
DN160LF |
DN160CF |
| Pumping rate L/S (for air) |
600 |
500 |
| Compression Ratio |
N2 |
109 |
109 |
| H2 |
6¡Á103 |
6¡Á103 |
| Ultimate Pressure (Pa) |
6¡Á10-7 |
6¡Á10-8 |
6¡Á10-6 |
6¡Á10-7 |
| Input Voltage/Frequency (V/Hz) |
380¡À20/50¡À1 |
| Cooling Water Pressure (kg/cm-2) |
0.5¡«1 |
| Fore Pump Type |
RVP-6 |
| Ambient Temperature |
4¡«40 °C |
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