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Sputtering Ion Pumps
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Power Supplies/Drive Controls
Vacuum Acqisition Equipment > 2L-50 Sputtering Ion Pump

2L-50 Sputtering Ion Pump

Techncial Parameters:

Type
2L-50
Connecting Flange
DN100CF
Pumping Rate (L/S) For Air
65
For Helium
0.6
Starting Pressure (Pa)
¡Ü5¡Á10-4
Ultimate Pressure (Pa)
7¡Á10-8
Baking Temp. (¡æ) With Magnet
£¼200
Without Magnet
£¼300
Working Voltage (KV)
+7
Electrode Number
2
Weight (Kg)
16
Dimension (mm)
290 ¡Á 120 ¡Á 299 (L ¡Á W ¡Á H )

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