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FJ-110 Molecular Pump Unit
FJ-110 series molecular pump unit is a clean and ultra-high vacuum acquisition
equipment with type F-100/110 series performance turbo molecular pump,
mechanical fore-pump, cutoff vent valve, backing line, molecular pump
power pack, control power pack etc. assembled on the stand. It provides
convenient installation, simple operation, easy connection, reliable performance,
and is widely used in surface analysis, accelerator technique, semi-conductive
devices, plasma technique, manufacturing of electro-vacuum elements and
vacuum technique etc.
Techncial Parameters:
| Type |
FJ-110 |
| Air Inlet Flange |
DN100LF |
DN100CF |
| Pumping Speed (L/S)£¨for air£© |
> 110 |
Compression
Ratio |
N2 |
> 108 |
H2 |
5 x 102 |
| Ultimate Pressure£¨Pa£© |
6 x 10-6 |
6 x 10-7 |
| Air Outlet Flange |
KF25 |
| Bearing |
fne mechanical bearing |
| Input Voltage/Frequency (V/Hz) |
220¡À20/50 |
| Ambient temperature (¡æ) |
0¡«40 |
| Fore Pump Type |
RVP-4 |
| Starting Time (min.) |
< 3 |
| Rated Rotation Rate (rpm) |
42,300 |
| Cooling Method |
water cooling, (air cooling can
be adopted) |
| Installation Method |
optional |
| Weight (Kg) |
52 |
| Dimension (mm) |
500¡Á510¡Á685 (L¡ÁW¡ÁH) |
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